In collaboration with the EFDS we organized the workshop “ALD for Industry 2017”. We appreciate to have more than 80 participants and sponsors from all over Europe and North America. There was an diversified programm with representatives from the European and American ALD Equipment Industry : Picosun (FIN), Beneq (FIN), Sentech (GER), FHR Anlagenbau (GER), Encapsulix (FRA), ASM International (NL) and Ultratech CNT (USA). Further we welcomed representatives from the chemical industry (Air Liquide), customers (Robert Bosch) and research institutions/universities from Germany (Fraunhofer, Leibniz, …) and Finland (Aalto University and VTT Finland) who gave invited and contributed talks.
After half a day of tutorials on ALD thechnology and fundamentals and a nice get-together at the Freiberger Schankhaus in Dresden in the evening, we heard great talks about the broad range of ALD processes, applications and equipment in the great ambiance of the Swissôtel Dresden.