EFDS ALD Workshop 2017 - Location

EFDS Workshop – ALD for Industry 2017

In collaboration with the EFDS we organized the workshop “ALD for Industry 2017”. We appreciate to have more than 80 participants and sponsors from all over Europe and North America. There was an diversified programm with representatives from the European and American ALD Equipment Industry : Picosun (FIN), Beneq (FIN), Sentech (GER), FHR Anlagenbau (GER), Encapsulix (FRA), ASM International (NL) … Read More


Review of ALD Symposium at SEMICON Europa 2016

Welcome to a review of 5th ALD Symposium at SEMICON Europa. The event was organized by ALD Lab Saxony and headed by Johann W. Bartha, director of the Institute of Semiconductors and Microsystems at TU Dresden. Main topic of the symposium was Atomic Layer Deposition (ALD), but also  further Atomic Layer Processing technologies, like Molecular Layer Deposition (MLD) and Atomic Layer … Read More


Program Released – ALD for Industry, EFDS Workshop 17-18 January 2017, Dresden, Germany

Last week we released the program for the tutorials for the  ALD for Industry, EFDS Workshop 17-18 January 2017, Dresden, Germany. Now we are very proud to release the full program for the Workshop the following day!   In an European context ALD was invented independently twice in Europe (Russia & Finland) and since the last 15 years Germany has … Read More

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ALD Symposium at SEMICON Europa, 25 October 2016

The 5th ALD Symposium at SEMICON Europa will be organized by ALD Lab Saxony, 25th of October in Grenoble France. The intention of the symposium is to bring together researchers, process developers, tool makers, precursor suppliers and applicants of this exciting technology that can be summarized as Atomic Layer Processing. Date: 25 October 2016 Time: 9:00–13:00 Location: Le Bans Web … Read More

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ALD Lab Saxony Fest 2016

This year we had our yearly ALD Lab Fest in great ambience at the “Ball- und Brauhaus Watzke” in Dresden. For the first time as ALD Lab Saxony Fest conference reports, an ALD market overview and internal topics were presented and discussed before we enjoyed the tasty Watzke beer and food. Many thanks to all participants for the contributions and … Read More

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ALD Lab Saxony presented Fast Precursor Screening at ALD 2016 Conference

IHM of TU Dresden and Fraunhofer have under the collaboration of “ALD Lab Saxony” for a number of years collaborated with Modularflow in using the Mini ALD Reactor for fast precursor screening. They presented results together in the Poster Session of ALD 2016 some weeks ago (see Poster below). The presented work was part of the Master Thesis research of … Read More